1. Design ability:

Our company is a company specializing in MEMS software development and hardware design, providing powerful software and technical support in device simulation, process simulation and layout design.

Intellisuite Physics Simulation

Fabsim process simulation (including more than 30 processes such as film deposition, lithography, etching, etc.)

2. Manufacturing capacity:

Our company has a 6-inch production line with complete process capabilities including lithography, film deposition (SiO2, SiNx, Au, Al, etc.), etching (Si, SiO2, SiNx and various metals), bonding and dicing, etc.

High aspect ratio etch (100:1) with better than 1% sidewall steepness

3. Packaging and testing capabilities:

Combined with the characteristics of PMUT itself, a miniaturized packaging process has been developed, and 16-channel and 64-channel transceiver circuits for pre-testing have been developed, which can realize the functions of PMUT transmission and echo signal reception, filtering, and amplification.

PMUT miniaturized package

16-channel transceiver circuit for PMUT testing

Products currently under development

2.5~20KHz acoustic wave sensor

20~500KHz low frequency air coupled ultrasonic transducer

100KHz~1MHz underwater ultrasonic transducer

1M~5MHz Medical and Nondestructive Testing Ultrasonic Transducer

5~10MHz medium and high frequency medical ultrasonic transducer