Piezoelectric Micromachined Ultrasound Transducer Applications
- 分类:Traditional MEMS sensor design, development and processing services
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- 发布时间:2021-06-26
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Piezoelectric Micromachined Ultrasound Transducer Applications
[Summary]
- 分类:Traditional MEMS sensor design, development and processing services
- Author:
- 来源:
- 发布时间:2021-06-26
- Visits:0
Application Example 1: Air-Coupled Transducers
Small size, more matching with air acoustic impedance, low frequency, miniaturized portable obstacle detection in the air: robot, VR, drone, human-computer interaction, anti-theft, gas flow monitoring, etc.
Portable human body diagnosis in special occasions: ultrasonic communication in battlefields, earthquakes, etc., wireless charging, in-situ embedded monitoring
Probe used: 60KHz PMUT
Size: 3*3mm
Driving voltage: 20V
Receive gain: 60dB
Send and receive mode: one send and one receive
Application Example 2: Nondestructive Testing of Internal Defects of Structural Parts
Application Example 3: Implantable Micro-Ultrasound
Small size, low power, low voltage
Ultrasonic communication, wireless charging, in-situ embedded monitoring (bolt detection, micro-gap monitoring)
Application example 4: On-line monitoring of liquid velocity (flow) in pipelines
The PMUT is small in size and can be integrated with an ASIC to form an ultrasonic micro-module, which can perform real-time online monitoring of the liquid flow in the pipeline.
Application Example 5: Online Monitoring of Pipeline Pressure
When the pressure of the liquid in the pipeline increases, its density and elastic modulus will also increase, so the speed of sound will change, and the response will be different in the ultrasonic testing system, that is, the echo time is different, so that the medium pressure can be detected;
Using the PMUT module can realize online measurement of increased pressure (tens of megapascals) in the pipeline.
Ultrasound module 1
Ultrasound module 2
Application example 6: Internal B-scan imaging of materials based on self-developed PMUT:
Application example 7: 3D imaging inside materials
The use of PMUT area array can realize 3D imaging inside the material. At present, our company has carried out 64 and 256 channel area array PMUT research.
Application Example 8: Underwater Acoustic Imaging
Using PMUT as the receiving array of underwater imaging sonar has the advantages of easy matching of acoustic impedance, large array, miniaturization, and high sensitivity.
Frequency of use: 100KHz~1MHz Detection distance: 10~1000m Imaging mode: 2D or 3D imaging Imaging distance error: <5cm |
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Frequency of use: 100KHz~1MHz
Detection distance: 10~1000m
Imaging mode: 2D or 3D imaging
Imaging distance error: <5cm
PMUT device products
The device mainly includes single-channel, four-channel and array structure, and the array structure includes line array and area array.
Frequency range: 50K-20MHz
Model: D200-11 Size: 1.5*1.5mm² Frequency: 50K/150K |
Model: D300-11 Size: 1*1mm² Frequency: 1.5/3MHz |
Model: D300-11 Size: 1*1mm² Frequency: 3/5MHz |
Model: D210-33 Size: 3*3mm² Frequency: 3/5M |
Model: D300-33 Size: 3*3mm² Frequency: 1.5/3MHz |
Model: D200-11
Size: 1.5*1.5mm²
Frequency: 50K/150K
Model: D300-11
Size: 1*1mm²
Frequency: 1.5/3MHz
Model: D300-11
Size: 1*1mm²
Frequency: 3/5MHz
Model: D210-33
Size: 3*3mm²
Frequency: 3/5M
Model: D300-33
Size: 3*3mm²
Frequency: 1.5/3MHz
High frequency narrow pitch line array
16 channel line array Channel center distance: 0.33mm Frequency: 3/5MHz Chip size: 6*3.5mm² |
Two-electrode 16-channel line array Channel center distance: 0.33mm Frequency: 3/5MHz Chip size: 6*3.5mm² |
Narrow pitch 16-channel line array Channel center distance: 0.25mm Frequency: 3/5MHz Chip size: 5*3.5mm² |
16 channel line array
Channel center distance: 0.33mm
Frequency: 3/5MHz
Chip size: 6*3.5mm²
Two-electrode 16-channel line array
Channel center distance: 0.33mm
Frequency: 3/5MHz
Chip size: 6*3.5mm²
Narrow pitch 16-channel line array
Channel center distance: 0.25mm
Frequency: 3/5MHz
Chip size: 5*3.5mm²
32-channel line array (one channel for every two columns, to increase the sound emission intensity)
Channel center distance: 0.58mm
Frequency: 3/5MHz
Chip size: 20*3.5mm²
64 channel line array
Channel center distance: 0.25mm
Frequency: 3/5MHz
Chip size: 17*3.5mm²
64 channel line array
Channel center distance: 0.25mm
Frequency: 1.5/3MHz
Chip size: 23*3.5mm²
64 channel line array
Channel center distance: 0.18mm
Frequency: 5/10MMHz
Chip size: 23*3mm²
high frequency area array
64-channel narrow-pitch area array Channel center distance: 0.25mm Frequency: 3/5MHz |
64-channel narrow-pitch area array Channel center distance: 0.5mm Frequency: 3/5MHz |
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