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Piezoelectric Micromachined Ultrasound Transducer Applications

Piezoelectric Micromachined Ultrasound Transducer Applications

[Summary]

Information

Application Example 1: Air-Coupled Transducers

Small size, more matching with air acoustic impedance, low frequency, miniaturized portable obstacle detection in the air: robot, VR, drone, human-computer interaction, anti-theft, gas flow monitoring, etc.

Portable human body diagnosis in special occasions: ultrasonic communication in battlefields, earthquakes, etc., wireless charging, in-situ embedded monitoring

 

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Probe used: 60KHz PMUT

Size: 3*3mm

Driving voltage: 20V

Receive gain: 60dB

Send and receive mode: one send and one receive

 

Application Example 2: Nondestructive Testing of Internal Defects of Structural Parts

 

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Application Example 3: Implantable Micro-Ultrasound

Small size, low power, low voltage

Ultrasonic communication, wireless charging, in-situ embedded monitoring (bolt detection, micro-gap monitoring)

 

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Application example 4: On-line monitoring of liquid velocity (flow) in pipelines

The PMUT is small in size and can be integrated with an ASIC to form an ultrasonic micro-module, which can perform real-time online monitoring of the liquid flow in the pipeline.

 

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Application Example 5: Online Monitoring of Pipeline Pressure

When the pressure of the liquid in the pipeline increases, its density and elastic modulus will also increase, so the speed of sound will change, and the response will be different in the ultrasonic testing system, that is, the echo time is different, so that the medium pressure can be detected;

Using the PMUT module can realize online measurement of increased pressure (tens of megapascals) in the pipeline.

 

Ultrasound module 1

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Ultrasound module 2

 

Application example 6: Internal B-scan imaging of materials based on self-developed PMUT:

 

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Application example 7: 3D imaging inside materials

The use of PMUT area array can realize 3D imaging inside the material. At present, our company has carried out 64 and 256 channel area array PMUT research.

 

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Application Example 8: Underwater Acoustic Imaging

Using PMUT as the receiving array of underwater imaging sonar has the advantages of easy matching of acoustic impedance, large array, miniaturization, and high sensitivity.

Frequency of use: 100KHz~1MHz

Detection distance: 10~1000m

Imaging mode: 2D or 3D imaging

Imaging distance error: <5cm

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Frequency of use: 100KHz~1MHz

Detection distance: 10~1000m

Imaging mode: 2D or 3D imaging

Imaging distance error: <5cm

 

PMUT device products

The device mainly includes single-channel, four-channel and array structure, and the array structure includes line array and area array.

Frequency range: 50K-20MHz

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Model: D200-11

Size: 1.5*1.5mm²

Frequency: 50K/150K

Model: D300-11

Size: 1*1mm²

Frequency: 1.5/3MHz

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Model: D300-11

Size: 1*1mm²

Frequency: 3/5MHz

Model: D210-33

Size: 3*3mm²

Frequency: 3/5M

Model: D300-33

Size: 3*3mm²

Frequency: 1.5/3MHz

Model: D200-11

Size: 1.5*1.5mm²

Frequency: 50K/150K

 

Model: D300-11

Size: 1*1mm²

Frequency: 1.5/3MHz

 

Model: D300-11

Size: 1*1mm²

Frequency: 3/5MHz

 

Model: D210-33

Size: 3*3mm²

Frequency: 3/5M

 

Model: D300-33

Size: 3*3mm²

Frequency: 1.5/3MHz

 

High frequency narrow pitch line array

 

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16 channel line array

Channel center distance: 0.33mm

Frequency: 3/5MHz

Chip size: 6*3.5mm²

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Two-electrode 16-channel line array

Channel center distance: 0.33mm

Frequency: 3/5MHz

Chip size: 6*3.5mm²

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Narrow pitch 16-channel line array

Channel center distance: 0.25mm

Frequency: 3/5MHz

Chip size: 5*3.5mm²

 

16 channel line array

Channel center distance: 0.33mm

Frequency: 3/5MHz

Chip size: 6*3.5mm²

 

Two-electrode 16-channel line array

Channel center distance: 0.33mm

Frequency: 3/5MHz

Chip size: 6*3.5mm²

 

Narrow pitch 16-channel line array

Channel center distance: 0.25mm

Frequency: 3/5MHz

Chip size: 5*3.5mm²

 

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32-channel line array (one channel for every two columns, to increase the sound emission intensity)

Channel center distance: 0.58mm

Frequency: 3/5MHz

Chip size: 20*3.5mm²

 

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64 channel line array

Channel center distance: 0.25mm

Frequency: 3/5MHz

Chip size: 17*3.5mm²

 

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64 channel line array

Channel center distance: 0.25mm

Frequency: 1.5/3MHz

Chip size: 23*3.5mm²

 

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64 channel line array

Channel center distance: 0.18mm

Frequency: 5/10MMHz

Chip size: 23*3mm²

 

high frequency area array

 

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64-channel narrow-pitch area array

Channel center distance: 0.25mm

Frequency: 3/5MHz

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64-channel narrow-pitch area array

Channel center distance: 0.5mm

Frequency: 3/5MHz

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Application Example 2: Internal Defects of Structural Parts Nondestructive Testing: Detection of Solid Structural Parts: Application example 3: Medical miniature ultrasonic detection and wireless communication Small size, low power, low voltage Ultrasonic communication, wireless charging
15 2022/06
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