Piezoelectric Micromachined Ultrasonic Flow Sensor
- 分类:Traditional MEMS sensor design, development and processing services
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- 发布时间:2020-07-23
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Piezoelectric Micromachined Ultrasonic Flow Sensor
[Summary]
- 分类:Traditional MEMS sensor design, development and processing services
- Author:
- 来源:
- 发布时间:2020-07-23
- Visits:0
1. Piezoelectric Micromachined Ultrasound Transducer (PMUT)
PMUT is an ultrasonic transducer based on piezoelectric energy conversion. It is usually composed of piezoelectric thin/thick films, upper and lower electrodes, support layers, and a cavity; the entire diaphragm area is driven to vibrate through the piezoelectric film, and ultrasonic waves are radiated outward. .
PMUT Features:
Low acoustic impedance - easy coupling with gases and liquids
Small size - 1mm~15mm adjustable
Can be batch prepared - low cost and good consistency
Easy to integrate with IC
The ultrasonic flowmeter is a flow sensor made according to the principle that the ultrasonic propagation speed changes with the change of the gas or liquid flow rate. The gas flow ultrasonic transducer usually has a frequency of 100KHz~1MHz, and the liquid flow ultrasonic transducer usually has a frequency of 1M~ 5MHz. |
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The ultrasonic flowmeter is a flow sensor made according to the principle that the ultrasonic propagation speed changes with the change of the gas or liquid flow rate. The gas flow ultrasonic transducer usually has a frequency of 100KHz~1MHz, and the liquid flow ultrasonic transducer usually has a frequency of 1M~ 5MHz.
The existing ultrasonic transducers can well meet the requirements of use, but they are usually large in size and difficult to install inside the pipeline; PMUT has a smaller size and is easy to manufacture on a large scale. |
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The existing ultrasonic transducers can well meet the requirements of use, but they are usually large in size and difficult to install inside the pipeline;
PMUT has a smaller size and is easy to manufacture on a large scale.
Product model: C3-200K-3 Package size: ≤5*5mm²
Bare chip size: 3*3mm² Package: QFN or DFN
Receiving Sensitivity: 20mV (one-transmit-one-receive mode, driving voltage: 25Cycle, Vpp=5V, square wave, transducer spacing 55mm)
Model |
Frequency |
Sensitivity/mV |
Driving mode |
Distance |
Driving Voltage/V |
Chip Size/mm³ |
C3-W350-1 (Static capacitance: 860 pF±10%; Directivity: 28° (half angle)) |
300K |
23 |
45 Cycle Square Wave |
35mm |
5V |
3*3*1 packaging) |
18 |
25 Cycle Square Wave |
35mm |
5V |
|||
50 |
Continuous |
35mm |
5V |
|||
22 |
45 Cycle Square Wave |
55mm |
5V |
|||
18 |
25 Cycle Square Wave |
55mm |
5V |
|||
35 |
Continuous |
55mm |
5V |
|||
C3-D250-4 (Static capacitance: 1300pF±10%; Directivity: 10° (half angle)) |
800K |
19 |
25 Cycle Square Wave |
25mm |
10V |
3*3*1 packaging) |
25 |
Continuous |
25mm |
10V |
|||
25 |
25 Cycle Square Wave |
25mm |
20V |
|||
32 |
Continuous |
25mm |
20V |
|||
C3-D250-1 (Static capacitance: 1800pF±10%; Directivity: 20° (half angle)) |
400K |
33 |
45 Cycle Square Wave |
55mm |
10V |
3*3*1 packaging) |
28 |
35 Cycle Square Wave |
55mm |
10V |
|||
21 |
25 Cycle Square Wave |
55mm |
10V |
|||
58 |
Continuous |
55mm |
10V |
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