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Piezoelectric Micromachined Ultrasonic Flow Sensor

Piezoelectric Micromachined Ultrasonic Flow Sensor

[Summary]

Information

1. Piezoelectric Micromachined Ultrasound Transducer (PMUT)

 

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PMUT is an ultrasonic transducer based on piezoelectric energy conversion. It is usually composed of piezoelectric thin/thick films, upper and lower electrodes, support layers, and a cavity; the entire diaphragm area is driven to vibrate through the piezoelectric film, and ultrasonic waves are radiated outward. .

 

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PMUT Features:

Low acoustic impedance - easy coupling with gases and liquids

Small size - 1mm~15mm adjustable

Can be batch prepared - low cost and good consistency

Easy to integrate with IC

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The ultrasonic flowmeter is a flow sensor made according to the principle that the ultrasonic propagation speed changes with the change of the gas or liquid flow rate. The gas flow ultrasonic transducer usually has a frequency of 100KHz~1MHz, and the liquid flow ultrasonic transducer usually has a frequency of 1M~ 5MHz.

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The ultrasonic flowmeter is a flow sensor made according to the principle that the ultrasonic propagation speed changes with the change of the gas or liquid flow rate. The gas flow ultrasonic transducer usually has a frequency of 100KHz~1MHz, and the liquid flow ultrasonic transducer usually has a frequency of 1M~ 5MHz.

 

The existing ultrasonic transducers can well meet the requirements of use, but they are usually large in size and difficult to install inside the pipeline;

PMUT has a smaller size and is easy to manufacture on a large scale.

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The existing ultrasonic transducers can well meet the requirements of use, but they are usually large in size and difficult to install inside the pipeline;

PMUT has a smaller size and is easy to manufacture on a large scale.

 

 

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Product model: C3-200K-3 Package size: ≤5*5mm²

Bare chip size: 3*3mm² Package: QFN or DFN

Receiving Sensitivity: 20mV (one-transmit-one-receive mode, driving voltage: 25Cycle, Vpp=5V, square wave, transducer spacing 55mm)

 

 

Model

Frequency

Sensitivity/mV

Driving

mode

Distance

Driving

Voltage/V

Chip

Size/mm³

C3-W350-1
(Static capacitance: 860 pF±10%;
Directivity: 28° (half angle))

300K

23

45 Cycle Square Wave

35mm

5V

3*3*1
(After 

packaging)

18

25 Cycle Square Wave

35mm

5V

50

Continuous

35mm

5V

22

45 Cycle Square Wave

55mm

5V

18

25 Cycle Square Wave

55mm

5V

35

Continuous

55mm

5V

C3-D250-4
(Static capacitance:
1300pF±10%;
Directivity: 10° (half angle))

800K

19

25 Cycle Square Wave

25mm

10V

3*3*1
(After 

packaging)

25

Continuous

25mm

10V

25

25 Cycle Square Wave

25mm

20V

32

Continuous

25mm

20V

C3-D250-1
(Static capacitance:
1800pF±10%;
Directivity: 20° (half angle))

400K

33

45 Cycle Square Wave

55mm

10V

3*3*1
(After 

packaging)

28

35 Cycle Square Wave

55mm

10V

21

25 Cycle Square Wave

55mm

10V

58

Continuous

55mm

10V

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