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IntelliSute software

Process Modeling

MEMaterial

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MEMaterial

The most comprehensive thin-film material database and process optimization tool available today, providing a vital link between process parameters and device characteristics. ◆ Contains more than 70 kinds of MEMS film material properties commonly used based on real process, making the simulation results more accurate; ◆ Allow users to add and customize materials; ◆ Directly export material properties to TEM analysis module through IntelliFab module; ◆ Optimize the process;

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The most comprehensive thin-film material database and process optimization tool available today, providing a vital link between process parameters and device characteristics.

◆ Contains more than 70 kinds of MEMS common film material properties based on real process, making the simulation results more accurate;

◆ Allow users to add and customize materials;

◆ Direct export of material properties to TEM analysis module through IntelliFab module;

◆ Optimize the process;

Material properties of a PECVD Si3N4 film

IntelliFab

RECIPE

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