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RF Switch Design Example

  • Categories:Software case
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  • Time of issue:2022-07-04
  • Views:853

RF Switch Design Example

(Summary description)

  • Categories:Software case
  • Author:
  • Origin:
  • Time of issue:2022-07-04
  • Views:853

One of the technical advantages of IntelliSuite software compared to other MEMS design and analysis software is that it can complete meshing, device simulation and subsequent system-level analysis based on the real physical model generated by process simulation. We illustrate with a design example of an RF switch.



Design layout

Design layout files with Blueprint modules


 Process flow

Design process flow with IntelliFab modules


Process simulation

Physical-level process simulation with the FabSim module


Model export

Export geometric models from Fabsim



Mesh the exported geometric model in the MeshManip module


Device level simulation

Set the emulation type


Set up contact pairs


Set load:


Divide the electrical grid:


Contact analysis results:


Macro model extraction:


Modal contribution value during pull-in


strain energy


system level analysis

System level model:


Set device properties:



Set simulation parameters:


Analysis result:

(a) Capacitance

(b) Pulse voltage signal  

(c) Representative point displacement

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