One of the technical advantages of IntelliSuite software compared to other MEMS design and analysis software is that it can complete meshing, device simulation and subsequent system-level analysis based on the real physical model generated by process simulation. We illustrate with a design example of an RF switch.

Design layout

Design layout files with Blueprint modules

 Process flow

Design process flow with IntelliFab modules

Process simulation

Physical-level process simulation with the FabSim module

Model export

Export geometric models from Fabsim

meshing

Mesh the exported geometric model in the MeshManip module

Device level simulation

Set the emulation type

Set up contact pairs

Set load:

Divide the electrical grid:

Contact analysis results:

Macro model extraction:

Modal contribution value during pull-in

strain energy

system level analysis

System level model:

Set device properties:

Set simulation parameters:

Analysis result:

(a) Capacitance

(b) Pulse voltage signal  

(c) Representative point displacement