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IntelliEtch
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IntelliEtch

◆ Accurate wet etching process simulation based on atomic model; ◆ Integrate DRIE and multiple mask compounding process functions; ◆ Cellular automata and dynamic Monte Carlo model based on octree and parallel computing; ◆ Complete etching process database, user-oriented open interface; ◆ Can define and cut any high-index crystal plane; ◆ Accurate description of corrosion surface morphology; ◆ Compatible with IntelliMask layout file and Bmp mask file; ◆ Output FEM grid data; ◆ IntelliEtchG based on GPU massively parallel computing; ◆ Wagon Wheel Analyzer silicon etch rate extraction tool; ◆ Etch Rate Visualizer / CCA calibrator Silicon etch rate visualization and calibration tool; ◆ Wagon Wheel Analyzer II Quartz Etch Rate Extraction Tool;
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◆ Accurate wet etching process simulation based on atomic model;

◆ Integrate DRIE and multiple mask compounding process functions;

◆ Cellular automata and dynamic Monte Carlo model based on octree and parallel computing;

◆ Complete etching process database, user-oriented open interface;

◆ Can define and cut any high-index crystal plane;

◆ Accurately describe the corrosion surface morphology;

◆ Compatible with IntelliMask layout file and Bmp mask file;

◆ Export FEM grid data;

◆ IntelliEtchG based on GPU massively parallel computing;

◆ Wagon Wheel Analyzer silicon etch rate extraction tool;

◆ Etch Rate Visualizer / CCA calibrator Silicon etch rate visualization and calibration tool;

◆ Wagon Wheel Analyzer II Quartz Etch Rate Extraction Tool;

 

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Simulation and experimental results of sapphire (Al2O3)

 

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concentrated sulfuric acid98% & Concentrated phosphoric acid 86%(volume3:1)

orientation<0001>, temperature: 236 C°, time: 180 minutes

 

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More and complicated material wet etching (eg. quartz)

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Added various etch rate database for Quartz

We could not find any corresponding parameters, please add them to the properties table

◆ 基于原子模型的精确湿法刻蚀工艺模拟;

◆ 集成 DRIE 和多次掩膜复合工艺功能;

◆ 基于八叉树和并行计算的元胞自动机及动力学蒙特卡罗模型;

◆ 完备的刻蚀工艺数据库，面向用户的开放的接口;

◆ 可定义和切割任意高指数晶面;

◆ 精确描述腐蚀表面形貌;

◆ 兼容 IntelliMask 版图文件和 Bmp 掩膜文件;

◆ 输出 FEM 网格数据;

◆ 基于 GPU 大规模并行计算的 IntelliEtchG;

◆ Wagon Wheel Analyzer 硅刻蚀速率提取工具;

◆ Etch Rate Visualizer / CCA calibrator 硅刻蚀速率可视化及校准工具;

◆ Wagon Wheel Analyzer II 石英刻蚀速率提取工具;

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