The process flow of the device is created by combining materials and layouts, and can be output to the FabSim module to generate a 3D virtual model, which is output to the TEM module for analysis.
◆ Complete MEMS process flow, including deposition, photolithography, etching, bonding, electroplating and other processes. Users can add their own crafts;
◆ Support standard MEMS process, such as MUMPS, SCREAM, SUMMIT, LIGA, Bosch Surface Micromachining, etc.
◆ Users can create their own crafts;
◆ Anisotropic wet etch rate display and tuning tool for patterned silicon and quartz materials
◆ Support SOI material, support the synchronization of resistivity and sheet resistance parameters;
◆ Support the output of Excel format process flow sheet
◆ Combined with the 3D model of the device generated by FabSim simulation process flow;
◆ Combine the influence of TEM analysis on the device to achieve more accurate multi-physics simulation;
IntelliFAB™ - Process Editor
The bottom-up design of IntelliSuite is based on process design. Familiar process steps, such as photolithography, thin film deposition, and selective etching, form the basis for the final device geometry.
Using IntelliFABTM allows users to perform process debugging and layout optimization before entering CleanRoom. It enables you to quickly create accurate virtual models and prevents losses from process errors.
IntelliFAB – Process simulation
·Foundry ready templates
·Design - process integration
IntelliFab: Setup complex process flow
1.Process Editor for MEMS
IntelliFAB makes editing and organizing a process table quick and easy. Setup your virtual process traveller exactly as you would for a real foundry.
2.Group, section, organize
Grouping common sets of processes into process subsets makes the organizing a complex traveler easy. You can group your process flow in any which way you please: by material, by process type or by process option.
Enter process parameters,tolerances and visualization settings in a single consolidated pane
4.Filter with ease
Filtering tools allow you to quickly focus on the processes that you want to explore
Export process traveler
◆ 支持标准MEMS工艺，如MUMPS, SCREAM, SUMMIT, LIGA, Bosch Surface Micromachining等。
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