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IntelliFab

The process flow of the device is created by combining materials and layouts, and can be output to the FabSim module to generate a 3D virtual model, which is output to the TEM module for analysis. ◆ Complete MEMS process flow, including deposition, photolithography, etching, bonding, electroplating and other processes. Users can add their own crafts; ◆ Support standard MEMS process, such as MUMPS, SCREAM, SUMMIT, LIGA, Bosch Surface Micromachining, etc. ◆ Users can create their own crafts; ◆ Anisotropic wet etch rate display and tuning tool for patterned silicon and quartz materials ◆ Support SOI material, support the synchronization of resistivity and sheet resistance parameters; ◆ Support the output of Excel format process flow sheet ◆ The 3D model of the device generated by simulating the process flow with FabSim; ◆ Combine the influence of TEM analysis on the device to achieve more accurate multi-physics simulation;
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The process flow of the device is created by combining materials and layouts, and can be output to the FabSim module to generate a 3D virtual model, which is output to the TEM module for analysis.

◆ Complete MEMS process flow, including deposition, photolithography, etching, bonding, electroplating and other processes. Users can add their own crafts;

◆ Support standard MEMS process, such as MUMPS, SCREAM, SUMMIT, LIGA, Bosch Surface Micromachining, etc.

◆ Users can create their own crafts;

◆ Anisotropic wet etch rate display and tuning tool for patterned silicon and quartz materials

◆ Support SOI material, support the synchronization of resistivity and sheet resistance parameters;

◆ Support the output of Excel format process flow sheet

◆ Combined with the 3D model of the device generated by FabSim simulation process flow;

◆ Combine the influence of TEM analysis on the device to achieve more accurate multi-physics simulation;

 

江苏英特神斯科技有限公司

 

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IntelliFAB™ - Process Editor
The bottom-up design of IntelliSuite is based on process design. Familiar process steps, such as photolithography, thin film deposition, and selective etching, form the basis for the final device geometry.

Using IntelliFABTM allows users to perform process debugging and layout optimization before entering CleanRoom. It enables you to quickly create accurate virtual models and prevents losses from process errors.

 

 

 

IntelliFAB – Process simulation

·Feature highlights

·Virtual prototyping

·Process validation

·Process databases

·Foundry ready templates

·Design - process integration

·Team collaboration

 

江苏英特神斯科技有限公司

 

 

江苏英特神斯科技有限公司

 

IntelliFab: Setup complex process flow

 

江苏英特神斯科技有限公司

 

1.Process Editor for MEMS

IntelliFAB makes editing and organizing a process table quick and easy. Setup your virtual process traveller exactly as you would for a real foundry.

2.Group, section, organize

Grouping common sets of processes into process subsets makes the organizing a complex traveler easy. You can group your process flow in any which way you please: by material, by process type or by process option.

3.Process Pane

Enter process parameters,tolerances and visualization settings in a single consolidated pane

4.Filter with ease

Filtering tools allow you to quickly focus on the processes that you want to explore

 

江苏英特神斯科技有限公司

 

Export process traveler

 

江苏英特神斯科技有限公司
 
 
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Process flow results can be exported to a variety of formats, including Microsoft PowerPoint with slides for each process step (full 3D view or any desired cross-section)
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结合材料、版图创建器件的工艺流程,并可输出到FabSim模块生成三维虚拟模型,输出到TEM模块进行分析。

◆ 完整的MEMS工艺流程,包括沉积、光刻、刻蚀、键合、电镀等工艺。用户可添加自有工艺;

◆ 支持标准MEMS工艺,如MUMPS, SCREAM, SUMMIT, LIGA, Bosch Surface Micromachining等。

◆ 用户可创建自有工艺;

◆ 图形化的硅和石英等材料的各向异性湿法刻蚀速率展示与调节工具

◆ 支持SOI材料,支持电阻率与方块电阻参数同步;

◆ 支持输出Excel格式工艺流程单

◆ 结合FabSim模拟工艺流程生成的器件的三维模型;

◆ 结合TEM分析对器件的影响,实现更精确的多物理场模拟;

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